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METRO系列测量站和多点测量装置的长度计

概要

高重复精度
超高精度:可达±0.2µm
密珠导轨和零反向间隙测量杆
小测量力版
超大量程,可达100mm
接口:1 VPP, TTL,11 µAPP
防护等级达IP6

特征

大量程mETRO系列长度计支持大量程高精度测量:MT 101长度计的测量范围达100mm,系统精度达±1µm。
高重复精度
合理选用材料、光学机械零件和密珠导轨、零反向间隙测量杆,这款长度计可达极高重复精度。结果:极高质量的测量值和极低测量值分散性。
小测量力
要测量十分敏感的工件,可用MT 1281的特殊版长度计,其测量力仅0.01N。电动驱动的长度计,例如MT 60M或MT 101M,还能在全量程上保持测量力不变。
多种测量杆驱动方式
用快门线手动操作
长度计相对被测对象运动
被测对象相对长度计运动
连接运动的设备部件
气动,用长度计上的压缩空气接头气动驱动
电动,用内置电机和按钮控制运

技术数据
机械数据 MT1271 MT2571 MT1281 MT2581 MT1287 MT2587
接口 TTL TTL 1Vpp 1Vpp 1Vpp 1Vpp
内部细分 5倍/10倍 5倍/10倍 - - - -
信号周期 4μm/2μm 4μm/2μm 2μm 2μm 2μm 2μm
机械允许运动速度 ≤30m/min
供电电压 DC5V±0.5V/<160mA(空载) DC5V±0.25V/<130mA(空载)
测量杆驱动 快门线或被测对象驱动 气动
自由状态时测量杆位置 伸出 缩回
测量基准 Zerodur玻璃陶瓷基体的DIADUR相位光栅;栅距4μm
系统精度 ±0.2μm
但信号周期位置误差 ≤±0.02μm
小行程精度典型值 0.03μm 0.04μm 0.03μm 0.04μm 0.03μm 0.04μm
参考点 距上止点下方约1.7mm处
测量范围 12mm 25mm 12mm 25mm 12mm 25mm
工作压力 - 0.9bar至1.4bar
径向力 ≤0.8N(机械允许)
固定 装夹杆φ8h6
测量方向 任何;无弹簧版和小测量力版:垂直向下
振动55Hz至2000Hz ≤100m/s2(EN60068-2-6)
冲击11ms ≤1000m/s2(EN60068-2-27)
工作温度 10℃至40℃;标准温度20℃
防护等级EN60529 IP50 IP50 IP50 IP50 IP67(带密封空气) IP67(带密封空气)
重量(不含电缆) 100g 180g 100g 180g 110g 190g
订货信息
Identnumber Plunger actuation Measuring
length
Type of
guide
Reference
mark
position
Accuracy
grade
Electrical connection
359341-01 Withmotor 60mm   1.7mm 0.5µm Connectorm23,male,9-pin
359341-02 Extended by gravity 60mm   1.7mm 0.5µm Connectorm23,male,9-pin
359341-04 Extended by gravity 60mm   30mm 0.5µm Connectorm23,male,9-pin
361139-01 Withmotor 100mm   10mm 1.0µm Connectorm23,male,9-pin
361139-02 Extended by gravity 100mm   10mm 1.0µm Connectorm23,male,9-pin
653246-01 Withmotor 100mm   10mm 1.0µm D-sub connector,2-row,with locking screws,male,15-pin
653248-01 Extended by gravity 100mm   10mm 1.0µm D-sub connector,2-row,with locking screws,male,15-pin
653249-01 Withmotor 60mm   1.7mm 0.5µm D-sub connector,2-row,with locking screws,male,15-pin
653250-01 Extended by gravity 60mm   1.7mm 0.5µm D-sub connector,2-row,with locking screws,male,15-pin
653251-01 Extended by gravity 60mm   30mm 0.5µm D-sub connector,2-row,with locking screws,male,15-pin
359355-02 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
359355-03 Extended by gravity 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
359355-10 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
359355-11 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
363409-02 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
363409-03 Extended by gravity 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
372495-01 extended with compressed air 25mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,12-pin
375162-01 extended with compressed air 12mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,12-pin
376990-01 extended with compressed air 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
376992-01 extended with compressed air 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
329350-02 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,9-pin
329350-03 Extended by gravity 12mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,9-pin
329351-02 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,9-pin
329351-03 Extended by gravity 25mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,9-pin
331314-02 Extended by spring force 12mm ball guide 1.7mm 0.2µm Connectorm23,male,12-pin
331314-03 Extended by gravity 12mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,12-pin
331666-01 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-02 Extended by gravity 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-04 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-05 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-06 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-51 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-52 Extended by gravity 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331666-S1 extended by spring force 12mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-01 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-02 Extended by gravity 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-03 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-05 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-07 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-51 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
331667-52 Extended by gravity 25mm ball-bush guide 1.7mm 0.2µm D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin
332104-02 extended by spring force 25mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,12-pin
332104-03 Extended by gravity 25mm ball-bush guide 1.7mm 0.2µm Connectorm23,male,12-pin
Identnumber Pin configuration Cable type Cable length Length
additional cable
Output signal
359341-01 D295051 PURØ4.5mm 1.5 1.50m sinusoidal current signals (11 µApp)
359341-02 D295051 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
359341-04 D295051 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
361139-01 D295051 PURØ4.5mm 1.5 1.50m sinusoidal current signals (11 µApp)
361139-02 D295051 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
653246-01 D330979 PURØ4.5mm 1.5 1.50m sinusoidal current signals (11 µApp)
653248-01 D330979 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
653249-01 D330979 PURØ4.5mm 1.5 1.50m sinusoidal current signals (11 µApp)
653250-01 D330979 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
653251-01 D330979 PURØ4.5mm 1.5   sinusoidal current signals (11 µApp)
359355-02 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
359355-03 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
359355-10 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
359355-11 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
363409-02 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
363409-03 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
372495-01 D294999 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
375162-01 D294999 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
376990-01 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
376992-01 D330978 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
329350-02 D295051 PURØ4.5mm 1.50m   sinusoidal current signals (11 µApp)
329350-03 D295051 PURØ4.5mm 1.50m   sinusoidal current signals (11 µApp)
329351-02 D295051 PURØ4.5mm 1.50m   sinusoidal current signals (11 µApp)
329351-03 D295051 PURØ4.5mm 1.50m   sinusoidal current signals (11 µApp)
331314-02 D294999 PURØ4.5mm 1.50m>   sinusoidal voltage signals (1 Vpp)
331314-03 D294999 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
331666-01 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331666-02 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331666-04 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331666-05 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331666-06 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
331666-51 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
331666-52 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
331666-S1 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331667-01 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331667-02 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331667-03 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331667-05 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 5-fold interpolation
331667-07 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
331667-51 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
331667-52 D330978 PURØ4.5mm 1.50m   Square-wave signals,TTL levels with 10-fold interpolation
332104-02 D294999 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
332104-03 D294999 PURØ4.5mm 1.50m   sinusoidal voltage signals (1 Vpp)
Identnumber Max. scanning
frequency
Reference
pulse width
Grating period Fault detection signal Signal
period
Power
supply
Degree of
protection
Operating
temperature
359341-01     10.000µm     5V+-5% IP50 +10/+40°C
359341-02     10.000µm     5V+-5% IP50 +10/+40°C
359341-04     10.000µm     5V+-5% IP50 +10/+40°C
361139-01     10.000µm     5V+-5% IP50 +10/+40°C
361139-02     10.000µm     5V+-5% IP50 +10/+40°C
653246-01     10.000µm     5V+-5% IP50 +10/+40°C
653248-01     10.000µm     5V+-5% IP50 +10/+40°C
653249-01     10.000µm     5V+-5% IP50 +10/+40°C
653250-01     10.000µm     5V+-5% IP50 +10/+40°C
653251-01     10.000µm     5V+-5% IP50 +10/+40°C
359355-02     4.000µm     5V+-5% IP50 +10/+40°C
359355-03     4.000µm     5V+-5% IP50 +10/+40°C
359355-10     4.000µm     5V+-5% IP50 +10/+40°C
359355-11     4.000µm     5V+-5% IP50 +10/+40°C
363409-02     4.000µm     5V+-5% IP50 +10/+40°C
363409-03     4.000µm     5V+-5% IP50 +10/+40°C
372495-01     4.000µm     5V+-5% IP50 +10/+40°C
375162-01     4.000µm     5V+-5% IP50 +10/+40°C
376990-01     4.000µm     5V+-5% IP50 +10/+40°C
376992-01     4.000µm     5V+-5% IP50 +10/+40°C
329350-02     4.000µm     5V+-5% IP50 +10/+40°C
329350-03     4.000µm     5V+-5% IP50 +10/+40°C
329351-02     4.000µm     5V+-5% IP50 +10/+40°C
329351-03     4.000µm     5V+-5% IP50 +10/+40°C
331314-02     4.000µm     5V+-5% IP50
(EN60529)
+10/+40°C
331314-03     4.000µm     5V+-5% IP50 +10/+40°C
331666-01 100.00kHz 90° for disturbance LOW for disturbance LOW 0.400µm 5V±10% IP50 +10/+40°C
331666-02 100.00kHz 90° for disturbance LOW for disturbance LOW 0.400µm 5V±10% IP50 +10/+40°C
331666-04 50.00kHz 90° for disturbance Ua1/Ua2 high-impedance for disturbance Ua1/Ua2 high-impedance 0.400µm 5V±10% IP50 +10/+40°C
331666-05 200.00kHz 90° for disturbance Ua1/Ua2 high-impedance for disturbance Ua1/Ua2 high-impedance 0.400µm 5V±10% IP50 +10/+40°C
331666-06 50.00kHz 90° for disturbance LOW for disturbance LOW 0.200µm 5V±10% IP50 +10/+40°C
331666-51 100.00kHz 90° for disturbance LOW for disturbance LOW 0.200µm 5V±10% IP50 +10/+40°C
331666-52 100.00kHz 90° for disturbance LOW for disturbance LOW 0.200µm 5V±10% IP50 +10/+40°C
331666-S1 50.00kHz 90° for disturbance LOW for disturbance LOW 0.400µm 5V±10% IP50 +10/+40°C
331667-01 100.00kHz 90° for disturbance LOW for disturbance LOW 0.400µm 5V±10% IP50 +10/+40°C
331667-02 100.00kHz 90° for disturbance LOW for disturbance LOW 0.400µm 5V±10% IP50 +10/+40°C
331667-03 200.00kHz 90°   for disturbance LOW 0.400µm 5V±10% IP50
(EN60529)
+10/+40°C
331667-05 50.00kHz 90°   for disturbance LOW 0.400µm 5V±10% IP50
(EN60529)
+10/+40°C
331667-07 25.00kHz 90°   for disturbance LOW 0.200µm 5V±10% IP50
(EN 60529)
+10/+40°C
331667-51 100.00kHz 90°   for disturbance LOW 0.200µm 5V±10% IP50
(EN60529)
+10/+40°C
331667-52 100.00kHz 90°   for disturbance LOW 0.200µm 5V±10% IP50
(EN 60529)
+10/+40°C
332104-02     4.000µm     5V+-5% IP50
(EN60529)
+10/+40°C
332104-03     4.000µm     5V+-5% IP50
(EN60529)
+10/+40°C
 
 

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