概要 |
高重复精度
超高精度:可达±0.2µm
密珠导轨和零反向间隙测量杆
小测量力版
超大量程,可达100mm
接口:1 VPP, TTL,11 µAPP
防护等级达IP6 |
特征 |
大量程mETRO系列长度计支持大量程高精度测量:MT 101长度计的测量范围达100mm,系统精度达±1µm。
高重复精度
合理选用材料、光学机械零件和密珠导轨、零反向间隙测量杆,这款长度计可达极高重复精度。结果:极高质量的测量值和极低测量值分散性。
小测量力
要测量十分敏感的工件,可用MT 1281的特殊版长度计,其测量力仅0.01N。电动驱动的长度计,例如MT 60M或MT 101M,还能在全量程上保持测量力不变。
多种测量杆驱动方式
用快门线手动操作
长度计相对被测对象运动
被测对象相对长度计运动
连接运动的设备部件
气动,用长度计上的压缩空气接头气动驱动
电动,用内置电机和按钮控制运 |
技术数据 |
机械数据 |
MT1271 |
MT2571 |
MT1281 |
MT2581 |
MT1287 |
MT2587 |
接口 |
TTL |
TTL |
1Vpp |
1Vpp |
1Vpp |
1Vpp |
内部细分 |
5倍/10倍 |
5倍/10倍 |
- |
- |
- |
- |
信号周期 |
4μm/2μm |
4μm/2μm |
2μm |
2μm |
2μm |
2μm |
机械允许运动速度 |
≤30m/min |
供电电压 |
DC5V±0.5V/<160mA(空载) |
DC5V±0.25V/<130mA(空载) |
测量杆驱动 |
快门线或被测对象驱动 |
气动 |
自由状态时测量杆位置 |
伸出 |
缩回 |
测量基准 |
Zerodur玻璃陶瓷基体的DIADUR相位光栅;栅距4μm |
系统精度 |
±0.2μm |
但信号周期位置误差 |
≤±0.02μm |
小行程精度典型值 |
0.03μm |
0.04μm |
0.03μm |
0.04μm |
0.03μm |
0.04μm |
参考点 |
距上止点下方约1.7mm处 |
测量范围 |
12mm |
25mm |
12mm |
25mm |
12mm |
25mm |
工作压力 |
- |
0.9bar至1.4bar |
径向力 |
≤0.8N(机械允许) |
固定 |
装夹杆φ8h6 |
测量方向 |
任何;无弹簧版和小测量力版:垂直向下 |
振动55Hz至2000Hz |
≤100m/s2(EN60068-2-6) |
冲击11ms |
≤1000m/s2(EN60068-2-27) |
工作温度 |
10℃至40℃;标准温度20℃ |
防护等级EN60529 |
IP50 |
IP50 |
IP50 |
IP50 |
IP67(带密封空气) |
IP67(带密封空气) |
重量(不含电缆) |
100g |
180g |
100g |
180g |
110g |
190g |
|
订货信息 |
Identnumber |
Plunger actuation |
Measuring
length |
Type of
guide |
Reference mark
position |
Accuracy
grade |
Electrical connection |
359341-01 |
Withmotor |
60mm |
|
1.7mm |
0.5µm |
Connectorm23,male,9-pin |
359341-02 |
Extended by gravity |
60mm |
|
1.7mm |
0.5µm |
Connectorm23,male,9-pin |
359341-04 |
Extended by gravity |
60mm |
|
30mm |
0.5µm |
Connectorm23,male,9-pin |
361139-01 |
Withmotor |
100mm |
|
10mm |
1.0µm |
Connectorm23,male,9-pin |
361139-02 |
Extended by gravity |
100mm |
|
10mm |
1.0µm |
Connectorm23,male,9-pin |
653246-01 |
Withmotor |
100mm |
|
10mm |
1.0µm |
D-sub connector,2-row,with locking screws,male,15-pin |
653248-01 |
Extended by gravity |
100mm |
|
10mm |
1.0µm |
D-sub connector,2-row,with locking screws,male,15-pin |
653249-01 |
Withmotor |
60mm |
|
1.7mm |
0.5µm |
D-sub connector,2-row,with locking screws,male,15-pin |
653250-01 |
Extended by gravity |
60mm |
|
1.7mm |
0.5µm |
D-sub connector,2-row,with locking screws,male,15-pin |
653251-01 |
Extended by gravity |
60mm |
|
30mm |
0.5µm |
D-sub connector,2-row,with locking screws,male,15-pin |
359355-02 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
359355-03 |
Extended by gravity |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
359355-10 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
359355-11 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
363409-02 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
363409-03 |
Extended by gravity |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
372495-01 |
extended with compressed air |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
375162-01 |
extended with compressed air |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
376990-01 |
extended with compressed air |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
376992-01 |
extended with compressed air |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
329350-02 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,9-pin |
329350-03 |
Extended by gravity |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,9-pin |
329351-02 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,9-pin |
329351-03 |
Extended by gravity |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,9-pin |
331314-02 |
Extended by spring force |
12mm |
ball guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
331314-03 |
Extended by gravity |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
331666-01 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-02 |
Extended by gravity |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-04 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-05 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-06 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-51 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-52 |
Extended by gravity |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331666-S1 |
extended by spring force |
12mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-01 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-02 |
Extended by gravity |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-03 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-05 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-07 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-51 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
331667-52 |
Extended by gravity |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
D-sub connector,2-row,with locking screws,with integrated electronics,coated,male,15-pin |
332104-02 |
extended by spring force |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
332104-03 |
Extended by gravity |
25mm |
ball-bush guide |
1.7mm |
0.2µm |
Connectorm23,male,12-pin |
|
Identnumber |
Pin
configuration |
Cable type |
Cable
length |
Length
additional
cable |
Output signal |
359341-01 |
D295051 |
PURØ4.5mm |
1.5 |
1.50m |
sinusoidal current signals (11 µApp) |
359341-02 |
D295051 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
359341-04 |
D295051 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
361139-01 |
D295051 |
PURØ4.5mm |
1.5 |
1.50m |
sinusoidal current signals (11 µApp) |
361139-02 |
D295051 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
653246-01 |
D330979 |
PURØ4.5mm |
1.5 |
1.50m |
sinusoidal current signals (11 µApp) |
653248-01 |
D330979 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
653249-01 |
D330979 |
PURØ4.5mm |
1.5 |
1.50m |
sinusoidal current signals (11 µApp) |
653250-01 |
D330979 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
653251-01 |
D330979 |
PURØ4.5mm |
1.5 |
|
sinusoidal current signals (11 µApp) |
359355-02 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
359355-03 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
359355-10 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
359355-11 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
363409-02 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
363409-03 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
372495-01 |
D294999 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
375162-01 |
D294999 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
376990-01 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
376992-01 |
D330978 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
329350-02 |
D295051 |
PURØ4.5mm |
1.50m |
|
sinusoidal current signals (11 µApp) |
329350-03 |
D295051 |
PURØ4.5mm |
1.50m |
|
sinusoidal current signals (11 µApp) |
329351-02 |
D295051 |
PURØ4.5mm |
1.50m |
|
sinusoidal current signals (11 µApp) |
329351-03 |
D295051 |
PURØ4.5mm |
1.50m |
|
sinusoidal current signals (11 µApp) |
331314-02 |
D294999 |
PURØ4.5mm |
1.50m> |
|
sinusoidal voltage signals (1 Vpp) |
331314-03 |
D294999 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
331666-01 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331666-02 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331666-04 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331666-05 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331666-06 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
331666-51 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
331666-52 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
331666-S1 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331667-01 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331667-02 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331667-03 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331667-05 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 5-fold interpolation |
331667-07 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
331667-51 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
331667-52 |
D330978 |
PURØ4.5mm |
1.50m |
|
Square-wave signals,TTL levels with 10-fold interpolation |
332104-02 |
D294999 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
332104-03 |
D294999 |
PURØ4.5mm |
1.50m |
|
sinusoidal voltage signals (1 Vpp) |
|
Identnumber |
Max. scanning
frequency |
Reference
pulse width |
Grating
period |
Fault
detection signal |
Signal
period |
Power
supply |
Degree of
protection |
Operating
temperature |
359341-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359341-02 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359341-04 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
361139-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
361139-02 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
653246-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
653248-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
653249-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
653250-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
653251-01 |
|
|
10.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359355-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359355-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359355-10 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
359355-11 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
363409-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
363409-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
372495-01 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
375162-01 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
376990-01 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
376992-01 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
329350-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
329350-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
329351-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
329351-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
331314-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50
(EN60529) |
+10/+40°C |
331314-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50 |
+10/+40°C |
331666-01 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331666-02 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331666-04 |
50.00kHz |
90° |
for disturbance Ua1/Ua2 high-impedance |
for disturbance Ua1/Ua2 high-impedance |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331666-05 |
200.00kHz |
90° |
for disturbance Ua1/Ua2 high-impedance |
for disturbance Ua1/Ua2 high-impedance |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331666-06 |
50.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.200µm |
5V±10% |
IP50 |
+10/+40°C |
331666-51 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.200µm |
5V±10% |
IP50 |
+10/+40°C |
331666-52 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.200µm |
5V±10% |
IP50 |
+10/+40°C |
331666-S1 |
50.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331667-01 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331667-02 |
100.00kHz |
90° |
for disturbance LOW |
for disturbance LOW |
0.400µm |
5V±10% |
IP50 |
+10/+40°C |
331667-03 |
200.00kHz |
90° |
|
for disturbance LOW |
0.400µm |
5V±10% |
IP50
(EN60529) |
+10/+40°C |
331667-05 |
50.00kHz |
90° |
|
for disturbance LOW |
0.400µm |
5V±10% |
IP50
(EN60529) |
+10/+40°C |
331667-07 |
25.00kHz |
90° |
|
for disturbance LOW |
0.200µm |
5V±10% |
IP50
(EN 60529) |
+10/+40°C |
331667-51 |
100.00kHz |
90° |
|
for disturbance LOW |
0.200µm |
5V±10% |
IP50
(EN60529) |
+10/+40°C |
331667-52 |
100.00kHz |
90° |
|
for disturbance LOW |
0.200µm |
5V±10% |
IP50
(EN 60529) |
+10/+40°C |
332104-02 |
|
|
4.000µm |
|
|
5V+-5% |
IP50
(EN60529) |
+10/+40°C |
332104-03 |
|
|
4.000µm |
|
|
5V+-5% |
IP50
(EN60529) |
+10/+40°C |
|
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产品样本 |
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